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APPLICATIONS
Yamatake has developed many different types of wet process
sensing products that are tailored to specific application
needs. The illustration shows the type of sensor that is typically
used at each point in the chemical management process.
There are many unique features
and capabilities of each type of sensor and this brochure
will outline for you this information so that you can determine
if your specific application is similar and will require the
identified proposed solution.
Based on conversations
with many OEM's, we have organized a chart showing the general
guidelines for leak detection and part compatibility with
both acidic and organic solvent liquids.
Acids
- No Metal or SUS Parts
- No Explosive Fumes Present
- PVC/CPVC Pan Material
- Self-Contained Leak Detector
- HPQ-D11/D12 Series
- With CPCV Bracket
- No Floating Head Detection Function
Organic Solvents
- No Plastic Parts
- Need Inherently Safe Design
- SUS Pan Material
- Fiberoptic Leak Detector
- HPF-D040
- With PFA and SUS grommet Bracket
- Floating Head Detection Function
In general, wafer cleaning
trending towards more organic solvents.
Of course, all of the above
depends on the solution concentrations and should only be
used as a general guideline.
| SELF-CONTAINED,
OPTICAL LEAK DETECTOR |
|  The
HPQ-D leak detection sensor family is the first of its
kind to be constructed entirely of sealed, Teflon(r)
PFA material and be configured in a self-contained package
smaller than a quarter. It does not require a fiberoptic
amplifier to be used since there is a useable NPN or
PNP transistor output with each sensor. Typically, only
1ml of liquid in contact with the optical focal point
will change the sensor's output. This enables early
detection of caustic chemical spills and can be used
to shut down the tool immediately, which minimizes the
environmental impact.
A large gain signal difference between no liquid and
liquid detection ensures low probability of false detection.
The fail safe design provides a normally closed output
that turns off when liquid is detected.
Easily viewable green LED signifies normal operation
and an orange LED turns on when liquid is detected and
output is shut off. The bracket assembly is made of
CPVC material and has an over/under patented style that
assures solid retention once locked down and the ability
to remove the sensor for maintenance or output checking.
The underside of bracket is flat and has perforated
mounting holes so you can mount with hardware or adhesive.
| Features
and Benefits |
- Sealed, Chemically Resistant Materials - 13mm
circular sensor pancake lays on bottom of semiconductor
wet process tool and detects liquid leak or
spill by refraction light principle (see illustration
on this page).
- Body is Teflon(r) PFA material with IP67 sealing
and the mounting bracket assembly is CPVC.
- 2 meters of PFA covers the sensing end of
the electrical cable.
- Quick Detection Minimizes Environmental Impact
and Messy Cleanup - Typically, 1ml of liquid
contact with the optical focal point will trigger
the signal change.
- Fail Safe Design - Output current is conducted
in normal dry conditions and will turn off in
the presence of liquid.
- The sensor can be used with any pan material
color.
- UL508 and CE approval by end of 2002.
- UL991 evaluation report based on applicable
SEMI S2 Standards will also be available.
- PNP and NPN output versions are available.
- Condition Indication Using Easy-to-View LED's
- Green LED indicates normal dry condition and
proper operation, orange LED indicates when
liquid is detected or operation is stopped.
- Low Initial and Operational Cost - The HPQ-D
series is priced very aggressively and will
require little maintenance unlike other prevailing
technologies.
|
| Catalog
Listings |
| HPQ-D11-L05
|
NPN Output,
5 meter electrical cable(USA Standard) |
| HPQ-D12-L05
|
PNP Output, 5 meter
electrical cable (USA Standard) |
| HPQ-D11 |
NPN Output, 2 meter electrical cable (JAPAN Standard)
|
| HPQ-D12 |
PNP Output, 2 meter
electrical cable (JAPAN Standard) |
| Floating
Head Detection |
|

|
|
Schematics |
| 
|
|
| Catalog Listings
|
|
|
HPQ-D11
|
HPQ-D12
|
|
Supply Voltage |
12-24
VDC +/- 10% (Ripple 10% max.) |
| Current
Consumption |
30 milliamp max. |
| Usable
Pen |
CPVC,
Stainless Steel, etc. |
| Output
Mode |
NPN
Transistor PNP Transistor |
|
Output |
Load
Current 50 mA max (resistive load)
Saturation Voltage 1V max.
Short Circuit, False Pulse,
Reverse Polarity Protection. |
| Light
Source |
Red
LED (645 nm) |
| Indicator |
Green
ON: Normal Condition
Orange ON: Liquid Detection |
| Operating
temperature |
-25
to 50 Degree C |
| Storage
temperature |
-40
to 70 Degree C |
| Sealing |
IP67
(IEC Standard) |
|
|
| |
|
| FIBEROPTIC LEAK DETECTION
(INHERENTLY SAFE) |
|  The
HPF-D040 fiberoptic leak detector is inherently safe in that
there is no circuitry at the sensing point, only light from
the associated amplifier. The amplifier would be mounted out
of the immediate sensing area. The small and narrow sensing
head and bracket are composed of chemically resistant Teflon(r)
PFA material.
A detachable mounting bracket block with an integral 316SS
mounting grommet insures adequate retention while offering
easy maintenance capability. The 5 meters of cable length
has a 60 micron covering of PFA material that provides chemical
protection along with field cut-to-desired-length ability.
Quick detection of spills is adjustable via
the amplifier used. 1ml of liquid typically is required to
change the amplifier's state. The fail safe design is achieved
by conducting light back to the amplifier when liquid is not
present. Liquid presence or a cable break will stop the light
from being returned. Unlike the self-contained version and
competitive offerings, the customer's pan is used to stabilize
and adjust the light return when setting the amplifier. If
the sensor becomes unattached and no longer sees the pan reflection,
the output will turn off. We call this "floating head
detection" capability.
| Features and
Benefits |
- Sealed, Chemically Resistant Materials - 13mm circular
sensor pancake lays on bottom of semiconductor wet
process tool and detects liquid leak or spill by refraction
light principle (see illustration on this page).
- Inherently Safe - Optical light is used from a remotely
mounted fiberoptic amplifier.
- Sealed, chemically resistant materials - PFA housing
and bracket with 316SS mounting grommet.
- Quick Detection minimizing environmental impact
and messy cleanup - typically, 1ml of liquid contact
with the optical focal point will trigger the signal
change. Sensitivity is adjustable to some extent by
the amplifier used.
- Fail Safe Design - Sensing light is conducted from
amplifier emitter, reflected off pan, then returned
to amplifier receiver. When liquid is present or cable
breaks, amplifier changes state.
- Floating Head Detection Capability - If the sensing
head becomes unattached from the pan, the amplifier
will change state. There is no reflective surface
included in the head design.
|
| Usage
Notes |
- Handle with care because the surfaces can be damaged
easily.
- Material - Sensor Housing: PFA, Mounting Base: PFA,
Grommet: SUS316L, Fiber Cable: See "Viewed from
A".
- Fiber cables can be cut with an included tool FE-PA-F1.
- Depending on color and viscosity of the liquid,
no detection can be made.
- Do not make over-stress on the housing by pulling
the cables.
- Mounting base can be detached from the sensor body.
|
| Specifications |
| Scanning
Type |
Diffuse
Scan |
| Target |
Liquid
Note: Depending on color and viscosity of the
liquid, no detection can be made |
| Tensile
Strength |
10N
max. |
| Bending
Radius |
R20mm
min. |
|
Operating Temperature |
-30+70
C
|
| Amplifier
Unit |
HPX-A,
HPX-H, HPX-ET, HPX-NT
(Letters and numbers depend on specifications) |
|
|
| HPQ-T PIPE MOUNTED,
SELF-CONTAINED LIQUID SENSOR |
|  The
HPQ-T sensor is designed specifically for liquid level detection
by non-contact methods in clear or very translucent pipes.
The sensor is mounted on a pipe that is between 3 to 7mm or
8 to 13mm in diameter and features an infrared light beam
that becomes refracted and undetectable by the receiver when
the liquid is present. The device runs on 10-28 VDC, has a
response time of 2 msec max, has Light Operate/ Dark Operate
Selectable output functioning, and has a 100 mA NPN or PNP
output. There is minimal malfunction when air bubbles or water
droplets are present. The indicator light is easy to view
even when the sensors are gang mounted as all the controls
and adjustments are located on the back side.
| Features and
Benefits |
- Small compact size and non-invasive sensing make
installation and height adjustment easy
- Many products to select from - provides flexibility
to user
based on concerns
- Thru scan principle where liquid refracts light
beam -
insures reliable detection
- Infrared beam can help penetrate slurries and other
solids
with similar detection effect as water/liquid. This
can be
used in mixing sections of the process.
- Light operate / dark operate selector switch provides
output
flexibility.
- Indicator lamp is easy to view even when sensors
are
gang mounted
|
| Catalog
Listings |
| HPQ-D11-L05 |
NPN Output, 5 meter
electrical cable(USA Standard) |
| HPQ-D12-L05 |
PNP Output, 5 meter electrical
cable (USA Standard) |
| HPQ-D11 |
NPN
Output, 2 meter electrical cable (JAPAN Standard) |
| HPQ-D12 |
PNP Output, 2 meter electrical
cable (JAPAN Standard) |
| Operating
Principle |
|

|
| Usage
Recommendation |
| The
standard gain setting versions work with most liquids.
The 25% gain reduction should be used when large quantities
of bubbles are present or where mixing in chambers requires
the sensor to be able to detect water/fluid, solids,
and mixture of solids/fluids equally. We recommend that
the prospective user evaluate their chemical combinations
and mixing situations to determine which sensor works
best before finalizing the specification for use. |
| Mounting
Assembly |
|

|
|
|
Schematics |
| 
|
|
| Specifications |
|
|
NPN
Models |
PNP
Models |
| Scanning
Type |
Through
Scan |
| Supply
Voltage |
10
to 28 V DC (ripple 10% max.) |
| Current
consumption |
25
mA max. |
| Usable
Pipe |
see
catalog listing chart |
|
Standard detecting object |
Water
Note 1 |
| Repetitive
detecting agency |
1 mm
max. |
| Operating
Mode |
Light-operated/dark-operated
selectable
(with L-On/D-On selector)
Detecting object: dark, Non-detecting object: light |
| Output |
Open
collector of NPN transistor |
Open
collector of PNP transistor |
| Response
time |
2ms
max. |
| Light
Source |
Infrared
LED |
| Indicator |
Red
"on" with detection |
| Ambient Light |
Incandescent
1000 lx max. |
| Operating temperature |
-10
~ +55°C |
| Storage temperature |
-25
~ +70°C |
| Humidity |
35~85%
RH (without condensation) |
| Insulation resistance |
20
M min. (at 500 V DC) |
| Dielectric strength |
1000
V A 50/60 Hz 1 minute |
| Vibration |
10~55
Hz, 15 mm double amplitude, 2 hours in each direction
of X,Y,Z |
| Shock |
500
m/s2 (approx. 50g)
3 times in each direction of X,Y,Z |
| Sealing |
IP50
(IEC standard) |
| Mass |
Approx.
25g |
| Protection |
False
pulse protection (20ms type), reverse polarity protection
|
| Approvals-CE
to be completed by end 2002 |
|
|
| FIBEROPTIC PHOTOELECTRIC
AMPLIFIERS |
| Please
contact your local Yamatake sales office as defined on the
back cover of this brochure for information on these products:
- HPX-NT Series Single unit, most sophisticated, digital
output, microprocessor based, 7 training modes, 3 operation
modes, fully adjustable timers and thresholds
- HPX-ET Series Gang mounted, digital output, microprocessor
based, 6 training modes, fully adjustable timers and thresholds
- HPX-T Series Single unit, digital output, microprocessor
based, 3 training modes, 40 millisecond off-delay option
- HPX Series 3 turn potentiometer with indication, lowest
cost, high power or low contrast versions recommended
|
|
| TEFLON PROBES FOR TANK
LEVEL DETECTION |
|  These
fiber cables are used exclusively for liquid level detection
in chemical baths, cleaning baths, and spin coaters/developers.
The liquid surface is detected by contact of the sensor tip
with the liquid surface. The proprietary tip structure prevents
liquid buildup so stable detection is maintained. Their bend
radius is less than all known competitors at 30 or 40mm and
they have an operating temperature range of -30 to 105 degree
C. Cable length is 2 meters.
| Catalog Listings/ Specifications |
| |
HPF-D033 |
HPF-D027
|
Diameter |
4
mm |
6
mm |
Bend Radius |
30
mm
|
40
mm |
| Operation Temperature |
-30
to 105°C |
-30
to 105° |
|
|
| FIBEROPTIC CABLE EXTENSION
ACCESSORY |
|  The
HPF-EU05 is a handy fiberoptic extension cord, so to speak,
that can be used to extend the fiberoptic connection from
the sensing fiber back to the controlling network. Quick implementation
of this extension fiber cable accessory is provided by: 1)
a fiber fixation lever that operates the same as those found
on a standard fiberoptic amplifier, 2) small space saving
size can be mounted to a hole cut in the plate with one motion.
Optical coupling power is maximized by the unitized structure
of the fiber connector.
| Specifications |
| Material-Case: |
PC/ABS resin alloy (black) |
| Opening
Temperature: |
-25
to + 60° |
Bending Radius: |
R4min
|
| Catalog
Listings |
| HPF-EU05 |
5 meter-fiberoptic
extension |
| Mounting
Assembly |
|

|
|
|
|
| LENSED, FLUOROPOLYMER
RESIN-COVERED THRU SCAN CABLES |
| 
HPF-T027- This fiber cable is configured using right angle
viewing lenses. The lenses allow extra scanning power through
the impervious Teflon(r) PFA covering that is vacuum formed
around the sensing tip and fiber cable body. Cable may be
cut to length at the sensor end.
HPF-T029 - This fiber cable pair is the latest technology
in Teflon cabling. Bend radius of 20 mm is best in class.
Scanning ranges of 5.25 meters when used with high power mode
of the new HPX-NT series is also best in class. Additionally,
the price is 40% lower than the traditional industry standard.
This fiber cable pair is completely covered by an impervious,
vacuum formed Teflon (PTFE) layer over the sensing head and
body of the fiber cable. The sensor end may be cut to length.
This cable pair can be used in cleaning baths, chemical baths,
and spin coaters/developers found in semiconductor processes.
Fiber cable assemblies are 100% positive pressure tested to
insure no leaks before shipment.
| Catalog Listings/ Specifications |
| |
HPF-T027
|
HPF-T029
|
Diameter |
5 mm
|
4.7
mm |
Covering |
PFA
Covered Side Viewing Thru Scan Pair |
PTFE
Covered Thru Scan Pair |
| Bending Radius |
80 mm
|
20 mm
|
| Operation Temperature |
-30 to 70°C
|
-30 to 70°C
|
| Price Point |
----- |
40% reduced price |
Scan
Range Chart Yamatake Amplifier Series |
HPX-ETS |
250 mm |
1050 mm |
HPX-NT HP |
1200 mm |
5250 mm |
HPX-NT NL |
690 mm |
3000 mm |
|
|
| PIPE MOUNTED, FIBER
CABLE TYPE LIQUID SENSOR (INHERENTLY SAFE) |
| 
The HPF-T032 fiber cable liquid sensor features a Fail Safe
design using an array style light beam. Unlike all know competitive
offerings, the HPF-T032 emitter/receiver arrangement requires
a beam refraction of 1.33 to 1.7 in order for the light to
be transmitted. This provides the utmost prevention of false
detection due to deposits on the inside of the chemical piping.
The array arrangement of the fibers provides a much higher
contrast signal level and the ability to not be affected by
bubbles of even 3mm size. The housing is made from GE Ultem(r)
plastic that is highly resistant to most organic solvents
and is capable of high temperature exposure. The HPF-T032
sensor can be used with pipe sizes from 1/8" to 1/2"
(3-13mm) and the fiber cutter and mounting hardware is shipped
with each sensor. A 60 micron covering of Teflon(r) PFA material
protects the 5 meter fiber length from chemical attack.
| Features and
Benefits |
- Fail Safe Design (Semi S2 Compliant)
- Chemically Resistant Materials
- Pipe Size 1/8" to 1/2" (3-13mm)
- Uses Multiple Beam Array - High Contrast Level
- Inherently Safe - Optical Light
|
| Catalog
Listings |
| HPF-T032 |
5 meter Fiberoptic
Cable Liquid Sensor |
| Usage
Recommendation |
| The
HPF-T032 fiber sensor has an outside fiber dimension
of 2.3mm. We recommend that the HPX-NT or the HPX-ET
series be used in conjunction with this fiber to insure
insertion ability without scraping Teflon film upon
insertion. The NT and ET sensor series are visible red
in nature so penetration through slurries and ability
to sense slurries same as clear liquid may be limited.
The HPF-T032 is not sealed from liquid penetration so
care should be taken to protect polycarbonate prisms
in sensing head from chemical attack. Please request
assistance from Yamatake for programming options that
will work in your specific application. |
| Mounting
Assembly |
|

|
|
| Operating
Principle |
|

|
|
|
|