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| Proposal of Mass Flow Controller for “Analyzers” |
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Proposal Flow Sensor and Meter for “Oxygen density detector”, “Gas detector” etc..
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| Advantages of azbil MFC |
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 1. Ultra quick flow control less than 300ms!! ( 0 to SP and SP to SP' )
» Can shorten analytical tact time (User side)
*** 1s on MPC
2. High accuracy (0.5%FS or 1%RD) and stable control-ability
» Can improve analytical performance (OEM side and User side)
*** 2%FS on MPC
3. Multiple control ranges available on board
» Can change control range up to 10% of original control range
» Can reduce stock items (OEM side)
*** not available on MPC
 4. Multi gas types available on board
» Can change gas types between 8 standard gas types (MQV)
» Can use one MQV for various reference gases (User side)
*** 4 gas types on MPC
5. Various function to ease operations
» Can reduce program procedure of PLC (OEM side)
» Can solve individual high-level requirements (User side)
6. Control range are 0 to 200mL/min 500L/min at Air and 0 to 500ccm 0to 1000L/min at H2/He (also 0 to 5mL/min and 0 to 20mL/min will be released on October 2007 )
» Can cover all of required control OEM ranges
*** MPC can cover 0 on 500ccm 20L/min
7. PC communicator is available (sold separately)
» Can ease operation for MFC and data-gathering (User side) |
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