The Yamatake MFC and MFM are based upon the "MicroFlow" Sensor. Developed using Micro-Machining and Thin-Film Technologies, the Ultra Miniature Thermal Flow sensor is capable of 1mm/sec resolution and 2msec response time at the chip level. This revolutionary technology is unaffected by temperature and/or pressure changes, and because of the symmetrical design, it has the ability of measuring reverse flow situations.