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High Performance Digital Mass Flow
Meters for the following gas types:
Air, Nitrogen, Argon, Oxygen, Carbon dioxide, City
gas(LNG), Methane, Propane, Butane, Hydrogen, Helium,
Ammonium, Acetylene, Hydrogen Sulfide, and Ethylene
Oxide (Other gases available - consult local sales representative
for more information.)
| Structure
and features of µF (Micro Flow) sensor |
- Manufactured by silicon micro-machining and
thin-film technologies, this thermal type flow
sensor is a mere 1.7mm(squared) and 0.5mm thickness.
- The use of ultra-precision machining technology
minimizes variations in element layout and thermal
capacity. High resolution of 1 mm/s in flow
speed and high-speed response of approx. 2ms
are achieved at the sensor chip level.
[Principle of Measurement] When gas flow does
not exist, the temperature distribution around
the heater is symmetric. When the gas starts to
flow from Ru to Rd, the temperature at Ru upstream
begins to decrease, while the temperature at Rd
downstream increases, thus causing a distortion
of the symmetry in temperature distribution. This
temperature difference between Ru and Rd is used
to calculate the mass velocity (velocity x density).
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| Key
Specifications |
- 200 sccm to 2000 sccm models available (dependent
upon gas type)
- Not influenced by Pressure and/or Temperature
fluctuations
- Unobstructed Flow Passage
- No Bipass Capillary which eliminates the need
for Calibration due to drift
- Integrated Digital Display and Programming
interface
- 1 External Input 2 Events
- 100 + 20 msec Sampling Cycle
- up to 0.5MPa pressure resistance
- 0 to 50 degrees C operating temperature
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