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High Performance Digital Mass Flow Controllers
for the following gas types:
Air, Nitrogen, Argon, Oxygen, Carbon dioxide, City gas(LNG),
Methane, Propane, Butane, Hydrogen, Helium, Ammonium, Acetylene,
Hydrogen Sulfide, and Ethylene Oxide (Other gases available
- consult local sales representative for more information.)
| Structure
and features of µF (Micro Flow) sensor |
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[Principle of Measurement] When gas flow does not exist,
the temperature distribution around the heater is symmetric.
When the gas starts to flow from Ru to Rd, the temperature
at Ru upstream begins to decrease, while the temperature
at Rd downstream increases, thus causing a distortion
of the symmetry in temperature distribution. This temperature
difference between Ru and Rd is used to calculate the
mass velocity (velocity x density).
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| Key Specifications |
- 200 sccm to 1000 sccm models available (dependent
upon gas type)
- Integrated (Normally Closed) Proportional Solenoid
Valve
- Not influenced by Pressure and/or Temperature fluctuations
- Unobstructed Flow Passage
- No Bipass Capillary which eliminates the need for
Calibration due to drift
- Up to + 1 % FS Accuracy
- Integrated Digital Display and Programming interface
- Remote Set Points, External Switch Inputs, and RS-485
communications
- 0-5/1-5 Volt Analog Output (Selectable)
- 1 Alarm and 2 Events
- Up to 500 msec response time (or better in some
applications)
- 10 msec Valve Output Renew Cycle
- 980 kPa pressure resistance
- -10 to 60 degrees C operating temperature
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