| 10. Mass Flow
Products |
| Description |
Model No. |
Catalog
(PDF) |
Specification Sheet (PDF)
|
User's Manual
(PDF) |
| Gas Mass Flow Meters |
CMS9500/0002/
0005/0020/0050/
0200/0500 |
CP-PC-1280E (417KB) |
- |
CP-SP-1114E (1.00MB) |
| Gas Mass Flow Meters |
CMS1500 |
- |
CP-SP-1119E (460KB) |
| Gas Mass Flow Meters (For Hydrogen and Helium Gases) |
CMS10/50/200/
500/1000/2000 |
- |
CP-SP-1118E (748KB) |
| Massflow Sensor |
MCS100 |
CP-PC-1399E (2.19MB) |
CP-SS-1833E (285KB) |
- |
| Digital Mass Flow Controllers |
CMQ9200/9500/
0002/0005/0020/
0050 |
CP-PC-1317E (458KB) |
- |
CP-SP-1112E (1.04MB)
CP-SP-1071E (Communication: 395KB) |
| Digital Mass Flow Controllers |
CMQ0050J/K,
CMQ0200J/K,
CMQ0500J/K |
- |
CP-SP-1116E (957KB)
CP-SP-1071E (Communication: 395KB) |
| Digital Mass Flow Controllers (For Hydrogen and Helium Gases) |
CMQ0005/0050/
0200 |
- |
CP-SP-1117E (1.01KB)
CP-SP-1071E (Communication: 395KB) |
| High-Flow Mass Flow Meter |
CML Series |
CP-PC-1364E (412KB) |
- |
CP-SP-1161E (895KB) |
| Gas Flow Monitor |
CMG Series |
CP-PC-1327E (343KB) |
- |
CP-SP-1113E (512KB) |
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