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SELF-CONTAINED,
OPTICAL LEAK DETECTOR [Click
the picture for pdf file]
Features
and Benefits
Sealed, Chemically Resistant
Materials - 13mm circular sensor pancake lays
on bottom of semiconductor wet process tool
and detects liquid leak or spill by refraction
light principle (see illustration on
this page).
Body is Teflon(r) PFA material with IP67 sealing
and the mounting bracket assembly is CPVC.
2 meters of PFA covers the sensing end of
the electrical cable.
Quick Detection Minimizes Environmental Impact
and Messy Cleanup - Typically, 1ml of liquid
contact with the optical focal point will trigger
the signal change.
Fail Safe Design - Output current is conducted
in normal dry conditions and will turn off in
the presence of liquid.
The sensor can be used with any pan material
color.
UL508 and CE approval by end of 2002.
UL991 evaluation report based on applicable
SEMI S2 Standards will also be available.
PNP and NPN output versions are available.
Condition Indication Using Easy-to-View LED's
- Green LED indicates normal dry condition and
proper operation, orange LED indicates when
liquid is detected or operation is stopped.
Low Initial and Operational Cost - The HPQ-D
series is priced very aggressively and will
require little maintenance unlike other prevailing
technologies.
